Hochpräzise Regelung

Bearbeiter Dipl.-Ing. Alexander Keck (ab 2012)

Projektpartner Institut für Technische Optik





Nanotechnologies find their way into everyday life in form of functional surfaces and microsystems. Miniaturization in advanced technologies demands for high-precision measuring and positioning concepts as well as machines, in order to analyze and manipulate objects on nanometer scale. Beside adjusted measurement equipment, construction and manufacturing of mechanics and measurement strategies, also concepts for the design and implementation of control systems are required. A fundamental aim is the conditioning of trajectory generation and control systems with respect to the measurement strategy, sensors, actuators and the sample to be measured. As a result the systems integration of sensors, actors and data handling in multiple scales (results in/leads to) new potentials to increase robustness and decrease measurement time. Within the scope of the DFG SPP1159 'New strategies of measurement and testing technology for the production of micro-system and nano-structures' a collaboration with the Institut für Technische Optik (ITO) and Institut für Fertigung und Fabrikbetrieb focuses on the systematic integration of all components. The concept and design of an Automated Multiscale Measurement System (AMMS) was proposed in [Zmn08].

For experimental validation of models and concepts, a modified MarForm MFU-100 [right figure] coordinate measuring machine (CMM) serves as testbed. In order to replace the controllers with a dSPACE 1005 system the electrical interfaces to the machine were adapted. Also parts of the mechanics were exchanged to meet the requirements of current projects.

The modeling includes electronic devices for actuation and sensing, as well as mechanical properties of setup and samples, and their relation to the positioning and measurement data quality. The control task is high precision path-tracking and fine positioning of multiple axes for multi-dimensional coordinated movements. Control objectives are fine positioning, disturbance rejection, and exact path tracking as a basis for coordinated movements of multiple axes. One focus is the modelling, identification and utilization of nanometerscale pre-sliding friction dynamics for system design and high-precision positioning.


Most of our research is done as part of industry cooperation projects or in collaboration with other academic institutions.

Beiträge in Zeitschriften
  • A. Keck, M. Böhm, K. Knierim, O. Sawodny, M. Gronle, W. Lyda & W. Osten, “Multisensorisches Messsystem zur dreidimensionalen Inspektion technischer Oberflächen”, tm - Technisches Messen, 81, pp. 280-288, 2014, doi:10.1515/teme-2014-0402
  • J. Zimmermann, O. Sawodny, W. Lyda & W. Osten, “A Control System for Automated Multiscale Measuring systems”, Mechatronics, 22, pp. 338-348, 2012, doi:10.1016/j.mechatronics.2011.11.003
  • A. Burla, W. Lyda, W. Osten, J. Regin, E. Westkämper, J. Zimmermann & O. Sawodny, “Verlässlichkeitsanalayse von Indikatorfunktionen in einem Automatisierten Multiskalen Meßsystem”, tm - Technisches Messen, 77, pp. 493-499, 2010, doi:10.1524/teme.2010.0033
  • A. Keck, O. Sawodny, M. Gronle, T. Haist & W. Osten, “Active Compensation of Dynamic Errors in a Coordinate-Measuring Machine”, 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference, Loughborough, UK, 2016
  • A. Keck & O. Sawodny, “Automation and control of a multi-sensor measuring system for quality inspection of technical surfaces”, International Conference on Control, Automation, Robotics & Vision (ICARCV), Singapore, 2014, doi:10.1109/ICARCV.2014.7064319
  • A. Keck, J. Zimmermann & O. Sawodny, “Friction parameter identification and compensation using the elastoplastic friction model”, Annual Meeting of the American Society for Precision Engineering, Boston, MA, USA, 2014
  • W. Lyda, A. Burla, T. Haist, J. Zimmermann, W. Osten & O. Sawodny, “Automated Multi-Scale Measurement System for MEMS-Characterization”, SPIE Conference on Optical Micro- and Nanometrology, 2010, doi:10.1117/12.853819
  • J. Zimmermann, S. Oliver, L. Wolfram & O. Wolfgang, “Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection Tasks: in Preprints of the 5th IFAC Symposium on Mechatronic Systems”, IFAC Symposium on Mechatronic Systems, Cambridge, MA, USA, 2010
  • A. Burla, J. Regin, W. Lyda, J. Zimmerman, W. Osten, E. Westkämper & O. Sawodny, “Relibility Analysis of Indicator Functions in an Automated Multiscale Measuring System”, Opto, Nürnberg, Germany, 2009
  • J. Zimmermann & O. Sawodny, “Modeling for Simulation and Control of a X-Y High Precision Positioning Table”, IEEE Conference on Automation Science and Engineering, Scottsdale, USA, 2007, pp. 1093-1097, doi:10.1109/COASE.2007.4341750
  • J. Zimmermann & O. Sawodny, “Modelling and Control of a X-Y-Fine Positioning Table”, Ilmenauer Wissenschafliches Kolloquium (IWK), 2007
  • J. Zimmermann, O. Sawodny, T. Hausotte & G. Jäger, “Friction Modelling for Control of a Linear High Prescision Actuator”, IFAC Symposium on Mechatronic Systems, Heidelberg, Germany, 2006, pp. 461-466, doi:10.3182/20060912-3-DE-2911.00081
  • J. Zimmermann, O. Sawodny, T. Hausotte & G. Jäger, “Friction modelling of a linear high-precision actuator”, IFAC World Congress , Prague, Czech Republic, 2005, pp. 3309-3314, doi:10.3182/20050703-6-CZ-1902.01201
Die Projekte in diesem Bereich wurden durch die Deutsche Forschungsgemeinschaft, sowie durch die Baden-Württemberg-Stiftung gefördert.