Owing to the accomplished progress in fabrication of optical components, modern optical systems are challenged with high requirements for image quality and minimal optical aberrations. This can only be achieved using high quality supports and links. Still, in complex systems optical aberrations are present due to many different reasons, a major one being disturbances originating from outside the system. These can often not be controlled. However, with an effective measurement and compensation schemeit is possible to mitigate the effect of the disturbance seen at the output of the optical system, which is most often the image and its quality. Modeling and control of dynamic systems form the basis for these concepts. At the Institute for System Dynamics, optomechatronic devices are modeled, followed by a feasible control design. The disturbances are estimated from measurements and used as inputs for the active and actuated optical components. Our research aims at exploiting the potential of today's integrated optical systems even more and thus increase the overall optical performance of these systems.
Research projects
- Design of model-based feedback controllers for disturbance compensation
- Design of model-based and model-free filters for disturbance feedforward control
- Control of optomechatronic compensation devices (mirrors)
- Integrated simulation characterizing the image quality
- Further informations
- Generation of spatial grating structures using scanning beam interference lithography (SBIL)
- Optimal trajectory generation for the precise stage and the actuated SBIL writing head
- Flatness-based feedforward control of the stage
- High-precision trajectory tracking control (position deviations in the nanometer range)
- Model-based disturbance compensation of friction and low-frequency vibrations of the vacuum chamber