Scanning Beam Inference Lithography on Spatial Structures
Scanning Beam Inference Lithography (SBIL), is a lithography technique that allows the efficient fabrication of large-scale grating structures on planar substrates.
My research project “3D-SBIL” deals with the development and investigation of methods to extend the SBIL technology for the fabrication of grating structures on nonplanar substrate geometries. This would open up new application areas, e.g. in the field of spectroscopy and laser optics.
To realize the project, an optical read and write head is being engineered to provide the required degrees of freedom for the extension into the third dimension. The main challenges arise from the high positioning accuracy, targeting the single-digit nanometer range.
- Since 08/2022
Research assistant at the Institute for System Dynamics
- 10/2019 - 06/2022
Master Degree "Engineering Cybernetics" at the University of Stuttgart
- 11/2021 - 06/2022
Master's thesis at the University of Padova, Italy
- 10/2020 - 12/2020
Internship at Robert Bosch GmbH in the field of "Locomotion of a Spider Robot via Deep Reinforcement Learning"
- 03/2019 - 10/2020
Working student at Bosch Center for Artificial Intelligence
- 10/2016 - 09/2019
Bachelor Degree "Engineering Cybernetics" at the University of Stuttgart