Contact
Waldburgstraße 19
70563 Stuttgart
Germany
Room: 1.53
Office Hours
By appointment
Subject
Scanning Beam Inference Lithography on Spatial Structures
Scanning Beam Inference Lithography (SBIL), is a lithography technique that allows the efficient fabrication of large-scale grating structures on planar substrates.
My research project “3D-SBIL” deals with the development and investigation of methods to extend the SBIL technology for the fabrication of grating structures on nonplanar substrate geometries. This would open up new application areas, e.g. in the field of spectroscopy and laser optics.
To realize the project, an optical read and write head is being engineered to provide the required degrees of freedom for the extension into the third dimension. The main challenges arise from the high positioning accuracy, targeting the single-digit nanometer range.
Conference Papers
- J. Rühle, E. Picotti and M. Bruschetta, "Learning-based Nonlinear Model Predictive Control for a High Performance Virtual Driver," 2023 IEEE Conference on Control Technology and Applications (CCTA), Bridgetown, Barbados, 2023, doi:10.1109/CCTA54093.2023.10252749
- Since 08/2022
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Research assistant at the Institute for System Dynamics
- 10/2019 - 06/2022
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Master Degree "Engineering Cybernetics" at the University of Stuttgart
- 11/2021 - 06/2022
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Master's thesis at the University of Padova, Italy
- 10/2020 - 12/2020
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Internship at Robert Bosch GmbH in the field of deep reinforcement learning
- 03/2019 - 10/2020
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Working student at Bosch Center for Artificial Intelligence
- 10/2016 - 09/2019
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Bachelor Degree "Engineering Cybernetics" at the University of Stuttgart