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Josias Rühle


Research Assistant
Institute for Systems Dynamics


Waldburgstraße 19
70563 Stuttgart
Room: 1.53

Office Hours

By appointment


Scanning Beam Inference Lithography on Spatial Structures

Scanning Beam Inference Lithography (SBIL), is a lithography technique that allows the efficient fabrication of large-scale grating structures on planar substrates.

My research project “3D-SBIL” deals with the development and investigation of methods to extend the SBIL technology for the fabrication of grating structures on nonplanar substrate geometries. This would open up new application areas, e.g. in the field of spectroscopy and laser optics.

To realize the project, an optical read and write head is being engineered to provide the required degrees of freedom for the extension into the third dimension. The main challenges arise from the high positioning accuracy, targeting the single-digit nanometer range.

Since 08/2022

Research assistant at the Institute for System Dynamics

10/2019 - 06/2022

Master Degree  "Engineering Cybernetics" at the University of Stuttgart

11/2021 - 06/2022

Master's thesis at the University of Padova, Italy

10/2020 - 12/2020

Internship at Robert Bosch GmbH  in the field of "Locomotion of a Spider Robot via Deep Reinforcement Learning"

03/2019 - 10/2020

Working student at Bosch Center for Artificial Intelligence

10/2016 - 09/2019

Bachelor Degree  "Engineering Cybernetics" at the University of Stuttgart

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